Design and Implementation of an Active Vibration Control Algorithm Using Servo Actuator Control Installed in Series with a Spring-Damper

The membrane-type air spring can be used to suppress lateral vibration of a isolation table. However, compared voice coil actuators, pneumatic actuators are difficult use for precise control, because servo valves have nonlinear dynamic characteristics. Therefore, such as placed in parallel with springs, allowing force-type provide additional force the system. These generate force. In case ball-screw mechanism device or linear servomotor, it is an actuator that generates displacement. represented serial active systems. Serial systems structurally simpler than there very few studies on using As two different types systems, new control algorithm suitable system needed. This study proposes which capable accurately controlling displacement connected series support spring-damper. A proposed also developed, termed position input and output. uses outputs desired installed damper spring. increases damping at target frequency reduces response Numerical experiments were conducted single-degree-of-freedom multi-degree-of-freedom results show efficacy novel suppression